Pressure sensor types MEMS capacitive piezoelectric strain gauge
Technical Guide

Pressure Sensors Explained: Types, Working Principles & Selection

Technical guide to pressure sensor types: piezoresistive, capacitive, piezoelectric. Working principles, equations, accuracy specs, and selection criteria for R&D engineers.

Back to Applications
By
Published · Updated
14 min read

Introduction

A pressure sensor converts mechanical pressure (force per unit area) into an electrical signal. Selecting the correct type requires understanding the sensing physics, the application's pressure range and accuracy requirements, the media being measured, and the output format needed by the control system. This guide covers every major sensing technology with quantitative detail for engineering decisions.

Measurement Reference Types

TypeReferenceEquationTypical Application
AbsolutePerfect vacuum (0 Pa)P_abs = P_processMAP sensor, altitude, barometric
GaugeAtmospheric (101.325 kPa)P_gauge = P_abs − P_atmOil pressure, tyre pressure, tank level
DifferentialSecond process portP_diff = P_port1 − P_port2Filter ΔP, flow measurement, level in closed vessel
Sealed gaugeSealed atmospheric referenceP_sealed = P_abs − P_ref_sealedHigh pressure where venting is not possible

Sensing Technologies

1. Piezoresistive (MEMS Silicon)

The most widely used technology in automotive and industrial applications. A silicon diaphragm with boron-doped piezoresistive bridges deflects under pressure. The gauge factor (GF) of silicon is 100–150× that of metallic strain gauges.

Piezoresistive Sensitivity

ΔR/R = GF × ε. For silicon, GF ≈ 130. For a diaphragm strain ε = 100 µε at full scale, ΔR/R ≈ 1.3% → bridge output ≈ 30–100 mV at 5V excitation. Signal conditioning (INA + ADC) converts to 0.5–4.5V or digital output.

Temperature sensitivity: the piezoresistive coefficient changes 0.1–0.3%/°C with temperature. All industrial and automotive sensors include an on-chip or external temperature compensation ASIC to correct for this effect across the rated temperature range.

2. Capacitive

A pressure-sensitive diaphragm changes the gap between a fixed and moving electrode, altering capacitance: C = ε₀εᵣA/d. Capacitive sensors offer:

  • Higher overload tolerance (the diaphragm bottoms out mechanically before damage)
  • Lower temperature coefficient than piezoresistive silicon
  • Suitable for very low pressure ranges (0–1 kPa differential) where piezoresistive sensitivity is insufficient
  • Used in HVAC room pressure, barometric, and medical ventilator applications

3. Piezoelectric

Quartz or ceramic piezoelectric crystals generate charge proportional to applied force: Q = d₃₃ × F, where d₃₃ is the piezoelectric coefficient (~2.3 pC/N for quartz). Key characteristics:

  • Only measures dynamic pressure changes — cannot hold a DC reading
  • Extremely high frequency response (up to 1 MHz)
  • Used for: combustion pressure, knock detection, acoustic emission, blast pressure
  • Requires charge amplifier (high-impedance front end) — not compatible with standard voltage-input ADCs

4. Thin-Film Metallic

Strain gauges sputtered directly onto a stainless steel diaphragm. Lower GF (~2–5) than silicon, but superior long-term stability and high overload capability. Preferred for:

  • High-pressure hydraulic applications (>500 bar)
  • Aggressive media (wet H₂S, chlorine, highly corrosive chemicals)
  • Applications requiring <0.1% FS long-term drift over 10 years

Full Technology Comparison

TechnologyPressure RangeAccuracyFreq. ResponseTemp RangeCost
Piezoresistive MEMS0–700 bar±0.1–0.5% FSDC to 10 kHz-40 to +150°CLow–Medium
Capacitive0–100 kPa±0.1–0.5% FSDC to 1 kHz-40 to +125°CMedium
PiezoelectricDynamic only±0.1% FS dynamicDC* to 1 MHz-200 to +600°CHigh
Thin-film metallic0–2000 bar±0.1–0.3% FSDC to 1 kHz-40 to +200°CMedium–High
Resonant MEMS0–10 bar±0.01% FSDC to 100 Hz-40 to +85°CVery High

Error Budget Analysis

Total measurement error (Total Error Band, TEB) comprises:

  • Offset error at reference conditions: typically ±0.1–0.5% FS
  • Non-linearity: ±0.1–0.5% FS — deviation from best-fit straight line
  • Hysteresis: ±0.1–0.2% FS — difference between increasing and decreasing pressure readings
  • Temperature coefficient of offset (TCO): ±0.01–0.05% FS/°C
  • Temperature coefficient of span (TCS): ±0.01–0.03% FS/°C
  • Long-term drift: ±0.1–0.5% FS per year

TEB Calculation Example

For a sensor with ±0.5% FS accuracy at 25°C, ±0.03%/°C TCO, and ±0.02%/°C TCS, operating at 125°C above the reference temperature: TEB = √(0.5² + (0.03×100)² + (0.02×100)²) = √(0.25 + 9.0 + 4.0) = ±3.7% FS. This shows that temperature effects dominate total error — specification of accuracy at 25°C alone is insufficient for field applications.

Need Help Selecting the Right Pressure Sensor?

Our engineering team can help you evaluate sensor technologies, calculate error budgets, and select the optimal solution for your application.

People Also Read

Engine Oil & MAP Pressure Sensors

Piezoresistive sensors for automotive engine monitoring applications.

12 min read

Read More

Hydraulic & Pneumatic Sensors

Selection guide for hydraulic and pneumatic pressure measurement.

10 min read

Read More

Compressor Monitoring

Pressure sensors for compressor condition monitoring and protection.

8 min read

Read More